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CleanRooms West 2001
October 8-10, 2001 in San Jose, California
Retrofitting an Existing Cleanroom for 300mm
Monday, Oct. 8th, 9:00am – 12:30pm (T-4)
Dennis Grant, Mac Willmert, Cathy Myers - IDC
Many fab owners are getting into 300 mm by building new facilities.
However, 300 mm requires different things on the factory floor from
preceding 150 – 200 mm technologies. Even manufacturers who
are not yet involved with 300 mm are facing the need to accommodate
advanced manufacturing technologies through the remodel of existing
cleanroom facilities. As process tools become larger, more expensive
and complex, the nature of remodel requirement is changing. This
session will examine some of the hurdles experienced by companies
who’ve already upgraded an existing cleanroom.
Controlling Contamination within an AMH System
Tuesday, Oct. 9th, 4:00pm – 5:00pm (S-10)
Larry Hennessy – IDC
AMHSs (Automated Material Handling Systems) are designed to
move throughout a cleanroom with the requirement of supporting the
manufacturing process. The necessity of intrabay automation being
used in 300 mm manufacturing extends the reach of this equipment
to areas that have had limited contact with this equipment in the
past. Attendees will learn:
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General cleanliness specifications for equipment for multiple
vendors
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Impact of penetrations across rooms and between floors
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Do's and don'ts for layouts and allowable track routing3D
Cleanroom
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 IDC,
2020 SW Fourth Avenue, Portland, Oregon, 97201, USA,
info@www.idc.ch2m.com,
tel: 503.224.6040
Copyright
1997-2002, CH2M HILL Industrial Design & Construction Inc. (IDC)
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